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What does XRL stand for?

XRL stands for X-Ray Lithography

This definition appears somewhat frequently

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Other Resources:
We have 2 other meanings of XRL in our Acronym Attic

Samples in periodicals archive:

7 TK7875 The core process in LIGA (the German acronym for lithography, electroplating, and polymer replication) is deep X-ray lithography at a synchrotron radiation source.
The roster includes ultra-precision milling, EDM, laser ablation, silicon micro-machining, electroplating, uv or x-ray lithography, and electron-beam (e-beam) lithography.
Their topics include microfabrication using x-ray lithography, the size effect in micromachining, laser-based fabrication, pulsed water drop micromachining, deposition routes and applications for nanocrystalline diamond, and commercialization issues.