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What does ArF stand for?

ArF stands for Argon Fluoride

This definition appears frequently and is found in the following Acronym Finder categories:

  • Science, medicine, engineering, etc.

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We have 302 other meanings of ArF in our Acronym Attic

Samples in periodicals archive:

Double patterning lithography using 193-nm argon fluoride (ArF) immersion lithography tools is rapidly approaching the limits of half-pitch scaling in advanced semiconductor manufacturing due to restriction of the freedom in pattern layout and rising costs associated with the need for additional processing steps.