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What does UHV-CVD stand for?

UHV-CVD stands for Ultra-High Vacuum Chemical Vapor Deposition

This definition appears somewhat frequently and is found in the following Acronym Finder categories:

  • Science, medicine, engineering, etc.

Samples in periodicals archive:

The first SiGe transistors made at the IBM Corporation were realized using expensive molecular beam epitaxy, but since then a number of interesting new techniques have been developed, such as the ultra-high vacuum chemical vapor deposition (UHV/CVD) |2~ and Rapid Thermal CVD |3~.