The selection of the GSD Ultra truly reflects the leadership position Axcelis' high current implant technology holds in the market, particularly for ultra shallow junction formation and other advanced low-energy implant applications," said Mike Luttati, COO of Axcelis.
On the junction scaling side, a unique ultra shallow junction scheme featured with an integrated diffusion barrier into boron doped SiGe (SiGe:B) strained p-MOSFETs is also been demonstrated.
The technology is seen as the most promising method of extending the viability of low energy implants, especially for the production of advanced ultra shallow junction (USJ) and dual poly gate (DPG) transistor structures.
The system's patented temperature measurement capability enables a broad temperature range from 300 degrees Celsius to 1200 degrees Celsius, giving device makers the ability to cover the full array of advanced thermal processing applications in transistor formation, including anneals for ultra shallow junctions, dry oxidation, silicides, shallow trench isolation (STI) oxides, and boron-doped phosphosilicate glass (BPSG) and titanium nitride (TiN) densification.
NASDAQ: ACLS) has received another order for its GSD Ultra ion implanter, a multi-wafer system used to produce ultra shallow junctions and other advanced transistor structures in semiconductor devices.
As chipmakers incorporate ultra shallow junctions and other advanced transistor structures into mainstream manufacturing, they require high current, low energy implant capabilities that allow them to produce these structures on a volume scale.
Introduced last year, the GSD Ultra has become the preferred high current implant system at chipmakers around the globe by offering a highly productive platform for producing ultra shallow junctions and other advanced transistor structures on a volume scale.
The new beamline shortens implant times to boost throughput and productivity, enabling chipmakers like Samsung to produce ultra shallow junctions and other advanced transistor structures on a high-volume scale.
