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What does TMU stand for?

TMU stands for Total Measurement Uncertainty

This definition appears somewhat frequently and is found in the following Acronym Finder categories:

  • Science, medicine, engineering, etc.

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Other Resources:
We have 45 other meanings of TMU in our Acronym Attic

Samples in periodicals archive:

The advanced capabilities of the Archer 500 include: * Tighter precision and total measurement uncertainty (TMU) compared to the previous-generation Archer 300, delivering the strict specifications required for overlay control on leading-edge devices; * Fast move-acquire-measurement (MAM) time and high throughput, allowing lithographers to take more measurements across the wafer for improved process characterization and control; and * A new, multi-layer design for the overlay metrology target, offering an innovative approach for measuring numerous combinations of intra- and inter-layer overlay data from the same target image on multi-patterning layers.