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Samples in periodicals archive:
The tester uses differential pressure decay testing technology to check the housings to a leakage rate accept/reject level of 3 standard cubic centimeters per minute (SCCM) at 10 pounds per sq in.
The D980 is available in eight different sizes to cover all gases and flows from 10 standard cubic centimeters per minute (sccm) to 30 standard cubic liters per minute (slm), which means that only eight multi-gas digital mass flow controllers are needed to replace hundreds of spare MFCs and part numbers.
In the process, that air flows across the sensor, which measures its amount directly in standard cubic centimeters per minute (SCCM).