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What does SVGL stand for?

SVGL stands for Silicon Valley Group Lithography

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Samples in periodicals archive:

The tool is significantly less expensive than existing optical, e-beam, and x-ray lithography tools from vendors such as Silicon Valley Group Lithography (NasdaqNM:SVGI), Ultratech Stepper (NasdaqNM:UTEK), ASM Lithography (NasdaqNM:ASML), Nikon Nikon (OTC:NINOY);, and Canon(NYSE:CAJ), Leica, JEOL, and JMAR (NasdaqNM:JMAR), and offers the advantages of significantly greater depth of field and higher throughputs.