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What does STI stand for?

STI stands for Shallow Trench Isolation

This definition appears very frequently

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We have 311 other meanings of STI in our Acronym Attic

Samples in periodicals archive:

Failure to meet surface topography variation constraints causes defocus and pattern dimensional error in lithography, degraded transistor characteristics in the case of shallow trench isolation (STI), and electrical shorts or increased wire resistance in the case of metal interconnects, all of which are detrimental to circuit yield.
Applied's focus on cost-effective, low-downforce CMP technology has contributed significantly to customers' increased use of our CMP systems for all types of leading-edge interconnect structures, including the most advanced copper/low k designs, as well as performance-critical transistor steps like shallow trench isolation and pre-metal dielectric polishing.
The Applied Centura DPS(R) Silicon Etch system for advanced gate, recess and shallow trench isolation and other transistor applications is firmly positioned as the system of choice for silicon etching.
The gauge-capable system gives users the ability to take repeatable, in-line measurements of shallow trench isolation (STI), as well as contacts and vias in high aspect ratio depth metrology without damaging the device or sacrificing a wafer for cross-sectioned measurements.