What does PSM stand for?

Phase Shifting Mask

This definition appears very rarely and is found in the following Acronym Finder categories:

Information technology (IT) and computers
Science, medicine, engineering, etc.

Other Resources:

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Samples in periodicals archive:

Michael Fritze of MIT Lincoln Laboratory is scheduled to give a paper describing the results, titled "Application of chromeless phase shifting masks to sub-100-nm SOI CMOS transistor fabrication," on Thursday, March 2, in Session 7 beginning at 1:30 p.

NumeriTech's Phase Shifting Technology Produces World's Smallest ...

Useful for system-on-a-chip applications, the SL3UV can inspect Tri-Tone phase shifting masks (PSMs), optical proximity correction (OPC) assist bars and surrounding chrome borders for defects and set different inspection sensitivities for different areas of the chip.

KLA-Tencor Introduces Advanced Reticle Contamination Inspection ...

DuPont Photomasks is a leading supplier of photomasks with optical enhancements like OPC and phase shifting masks," said Art Launder, executive vice president of North America for DuPont Photomasks.

KLA-Tencor Introduces Advanced Inspection Technology for OPC ...