What does KRF stand for?

Under the agreement, Toshiba will include Cymer's krypton fluoride (KrF) and argon fluoride (ArF) light sources in Toshiba's future 300mm investment plan at its memory fab in Japan.

Two types of lasers are being developed in the HAPL program: Krypton Fluoride (an electron beam pumped gas laser) at the Naval Research Laboratory and a diode-pumped solid state laser at the Lawrence Livermore National Laboratory.

Cymer contends that the short wavelength of its ultraviolet krypton fluoride gas laser can project smaller features of the wafer than the standard mercury light.

The light from a KrF, or krypton fluoride source has a wavelength of 248nm, which ASML manipulates to print circuit features below 100nm.

The other approach uses direct drive targets, either a krypton fluoride (KrF) or diode-pumped solid-state laser, and a dry wall chamber.

Under this scenario we would also expect our krypton fluoride and non-systems revenue streams to, at a minimum, provide stability.

NRL operates a large krypton fluoride (KrF) laser called Nike for laser fusion research in support of DOE Defense Programs.

Deployed for use in system tools developing memory-based semiconductor devices such as FLASH and DRAM; the ELS-6000 Series, are krypton fluoride (KrF) production light sources, offering a low-risk path to 90nm production, while the XLA 100 employs Cymer's production-proven dual chamber MOPA (Master Oscillator Power Amplifier) platform, to drive 65nm production.