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What does HSPMI stand for?

HSPMI stands for High Stability Plane Mirror Interferometer

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Samples in periodicals archive:

The KMS100(TM) also features a new high resolution positioning stage incorporating ZYGO's ZMI 510 High Stability Plane Mirror Interferometer and planar optics, and new Zygo proprietary optical proximity effect (OPE) correcting algorithms, to deliver the optical resolution, linearity, and precision necessary for measuring subwavelength features on advanced reticles.
75NA DUV objective for through-pellicle metrology; a new high resolution positioning stage incorporating ZYGO's ZMI 510 High Stability Plane Mirror Interferometer and planar optics, and new proprietary optical proximity effect (OPE) correcting algorithms, to deliver the optical resolution, linearity, and precision necessary for measuring subwavelength features on advanced reticles.