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According to the International Technology Roadmap for Semiconductors (ITRS-1999), eighty percent of equipment repair time consists of simply diagnosing the problem," said Thomas Sulzbacher, vice president of business development of AvantCom's semiconductor operations.
Toshiba has demonstrated the ability to minimize equipment repair times through its quick-response approach to customer issues, strategically located parts depots and continuous biomedical training for customers.
Equipment or process diagnostic rules can be generated for detecting early sign of tool or process failures, or pinpointing the root causes of tool failure to reduce equipment repair time.