This definition appears very rarely
and is found in the following Acronym Finder categories:
- Information technology (IT) and computers
See other meanings of EFEM
We have 3 other definitions for EFEM
in our Acronym Attic
Samples in periodicals archive:
As an example, EVG's new flagship model in the GEMINI FB fusion wafer bonder family, launched at SEMICON Taiwan 2011, is now also available with an optional equipment front end module, a faster handling system and a local material buffer.
Brooks will continue to work proactively with August Technology to ensure that FabExpress addresses this customer's needs in Equipment Front End Module (EFEM) technology.
NASDAQ: BRKS), a leader in tool and factory automation solutions for the global semiconductor industry, today announced that its AutoSimulations Division has released ClusterSim(TM), a new 3-D animated simulation package for modeling cluster tools, including process modules clustered directly to an equipment front end module (EFEM), in semiconductor manufacturing.