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What does EFEM stand for?

EFEM stands for Equipment Front End Module

This definition appears frequently and is found in the following Acronym Finder categories:

  • Information technology (IT) and computers

See other definitions of EFEM

Other Resources:
We have 3 other meanings of EFEM in our Acronym Attic

Samples in periodicals archive:

NASDAQ: BRKS), a leader in tool and factory automation solutions for the global semiconductor industry, today announced that its AutoSimulations Division has released ClusterSim(TM), a new 3-D animated simulation package for modeling cluster tools, including process modules clustered directly to an equipment front end module (EFEM), in semiconductor manufacturing.