What does EDS stand for?

Energy Dispersive Spectrometer (attachment for scanning electron microscope for chemical analysis)

This definition appears very rarely and is found in the following Acronym Finder categories:

Science, medicine, engineering, etc.

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Samples in periodicals archive:

Solosky, Accuracy of Quantitative Electron Probe Microanalysis with Energy Dispersive Spectrometers, Anal.

Limitations to accuracy in extracting characteristic line intensities ...

With this severe limitation imposed on utilizing conventional WDS in low beam current instruments, the usual choice for low beam energy x-ray spectrometry in high resolution SEMs necessarily becomes the semiconductor energy dispersive spectrometer with a monolithic silicon crystal (Si-EDS).

Barriers to quantitative electron probe x-ray microanalysis for low ...