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What does EPL stand for?

Electron Projection Lithography


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This definition appears very rarely and is found in the following Acronym Finder categories:

  • Science, medicine, engineering, etc.

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Samples in periodicals archive:
Areas covered include immersion lithography, EUV lithography, electron projection lithography, nanoimprint lithography, dip-pen lithography, e-beam, and specialist tools for nanotechnology, among others.
Despite technical and economical hurdles, extreme ultra violet lithography (EUVL) and electron projection lithography (EPL) with their ability to pattern features as small as 32-nm are the prime contenders to replace optical lithography.
The system shipped to Selete is the world's first full field electron projection lithography (EPL) tool and will initially be used for advanced 65 nm development.

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