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What does EBR stand for?

Edge Bead Removal (semiconductor wafer manufacturing)


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This definition appears very rarely and is found in the following Acronym Finder categories:

  • Information technology (IT) and computers
  • Science, medicine, engineering, etc.

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Other Resources:

Link/Page Citation...

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Samples in periodicals archive:
The ACS300 module offers closed cover coating technology and best-in-class edge bead removal precision and therefore enables optimum thick resist processing for 3D integration processes.
The ACS300 module offers closed cover coating technology and best-in-class edge bead removal precision and therefore enables optimum thick resist processing for 3D integration processes.
Like its predecessors, the E30 module also provides metrology capability for the edge-bevel profile, multi-film edge bead removal and bevel clean processes.
The EXi Series also automatically performs Edge Bead Removal (EBR) and Wafer Edge Exclusion (WEE) metrology.

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