What does CD stand for?

The Caliper Mosaic and Atlas OCD systems are expected to be installed and qualified in the third and fourth quarter of this year at multiple fab sites of a leading memory customer, supporting lithography cell control and optical critical dimension (OCD) metrology.

The probe makes possible rapid, automated part setup and changeover, in-process control of critical dimensions, and final parts inspection tospeed throughput.

According to the FIA, the details include the layout and critical dimensions of the McLaren F1 car, fuelling system, gear assembly, oil cooling system, hydraulic control system and a novel suspension component used by the 2006 and 2007 cars.

We join two strong product lines with little overlap, and bring to market a better fab-wide solution with advanced macro inspection, critical dimension (CD) and film thickness metrology aimed at the most challenging wafer processing areas such as lithography," said Nanometrics CEO John Heaton.

The final report for a one-year project to apply a model-based library (MBL) method to measurements performed with critical dimension scanning electron microscopes (CD-SEMs) has been submitted to International SEMATECH.

If that material has a high shrinkage factor and there is a critical dimension across a relatively long section, then it may not be possible to maintain a tolerance of [+ or -]0.

Nanometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced process control metrology systems used primarily in the manufacturing and packaging of semiconductors, solar photovoltaics and high-brightness LEDs, today announced multiple orders from new and existing HB-LED customers for RPMBlue([TM]) and IVS185[TM] metrology systems, which will be used for photoluminescence (PL) mapping and critical dimension and overlay control, respectively.

Multiple tools for critical dimension and pattern placement metrology systems were already delivered to the customer in previous years.