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The company's products are used to regulate the flow rates of gases and liquids in laboratory and process environments and include: thermal mass flow controllers, variable area meters, coriolis and ultrasonic flow meters, and capacitance diaphragm gauges.
An example of this type is the capacitance diaphragm gauge (42), in which a thin metal diaphragm stretched between two electrodes deflects away from its equilibrium position with the application of pressure; the deflection changes the capacitance between the diaphragm and the electrodes, and this change is converted to a pressure indication by conditioning electronics.
And at last week's SEMICON West trade show, we introduced new products, expanding our line of innovative SKY[R] CDG Capacitance Diaphragm Gauges and featuring the Sion[TM] RF Detector, the only ultra-fast, ultra-small plasma arc detector.
July 11 /PRNewswire-FirstCall/ -- Mykrolis Corporation , a leading supplier of components and subsystems to the semiconductor industry, today announced the release of the XacTorr CMC series of compact capacitance diaphragm gauges (CDGs) for vacuum processes that provide accurate total pressure measurement independent of gas composition.
INFICON Holding AG (SWX Swiss Exchange and NASDAQ: IFCN), a leading manufacturer of vacuum instrumentation and advanced process control software for the semiconductor and related industries, will introduce the TripleGauge(TM) Bayard-Alpert Pirani Capacitance Diaphragm Gauge at SEMICON West 2003, San Francisco.
Fluorogard(R) RS Cartridge and Disposable Filters for contamination control in photoresist stripping and residue removal processes -- Impact(R) 2 Filter and Impact(TM) 2 Manifold for photochemical filtration -- Intercept(R) HP Cartridge Filter for particle removal in DHF, HF, BOE, copper plating and low pH process chemistries -- Planargard(R) CS Cartridge Filter for retention of unwanted particles in point-of-use CMP process -- Processgard(TM) NP Cartridge and Disposable Filters for flat panel display prefiltering or parts plating processes -- Wafergard(R) SC Point-of-Use Filter for high-pressure CO2 in wafer stripping and cleaning applications -- XacTorr Digital Capacitance Diaphragm Gauge for vacuum-based thin film processes
the XacTorr(TM) Digital Capacitance Diaphragm Gauge for
The Mykrolis process-critical chamber pressure control sub-system, which comprises the Intellisys integrated butterfly throttle valve systems and XacTorr(R) Digital Capacitance Diaphragm Gauges (CDGs), was nominated by a large Asian semiconductor manufacturer for 300mm processing equipment.