Introduced in 2008, the Alpine etch system has demonstrated greater than 30% Cost-of-Ownership reduction against a leading etch competitor for the back-end-of-line integration of low-k dielectric and copper.
92 TK7871 Papers from a September 2006 conference, 86 in all, cover all aspects of the use of ultra-clean technology for large-scale integration of semiconductors, and cleaning and contamination-control in both front- end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Mattson's sustained strip leadership in the foundry market is proof that our systems continue to deliver the processing and productivity performance our customers value for both front-end-of-line and back-end-of-line applications," said Stephen T.
Selected, peer reviewed papers from the 8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) held in Antwerp, Belgium, September 18-20, 2006 This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
Nasdaq: FSII), a leading manufacturer of wafer cleaning systems used in the fabrication of integrated circuits, announced today that it shipped its single wafer wet cleaning technology to a major semiconductor manufacturer for the development of back-end-of-line (BEOL) cleaning capability for 32nm IC manufacturing.
Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD).
Aviza offers both front-end-of-line (FEOL) and back-end-of-line (BEOL) process applications including products for atomic layer deposition (ALD), diffusion and low pressure chemical vapor deposition (LPCVD) furnaces, atmospheric pressure CVD (APCVD), CVD, etch and physical vapor deposition (PVD).
