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Samples in periodicals archive:
The WaferView tool provides a superior automated solution for high-throughput macrodefect inspection with its unique combination of a full-color vision system; an on-board ReviewScope(TM) microscope, which eliminates the need for a separate review tool; robust, automatic defect classification software; and backside inspection capability.
Abstract A genetic algorithm was used to determine an appropriate set of features for automatic defect classification of radiata pine boards.
The Applied Defect Review SEMVision systems are designed for the most advanced review applications, capable of automatic defect redetection (ADR) and automatic defect classification (ADC) of critical defects.
Two new imaging modes extend sensitivity to 20nm, and a new flexible automatic defect classification engine enables quick access to defects of interest and faster yield learning.
today announced that its latest-generation e-beam wafer inspection system, the eS20XP, now includes in-line automatic defect classification (iADC).
NASDAQ:RTEC), a leading provider of process characterization solutions for the semiconductor manufacturing industry, today announced that it has seen rapid acceptance of its TrueADC([TM]) Software for automatic defect classification.
It includes advanced optical noise suppression modes for improved sensitivity and defect capture on back-end-of-line (BEOL) and front-end-of-line (FEOL) layers, as well as in-line automatic defect classification (iADC) for real-time classification.
Rudolph's automatic defect classification, defect review, and yield management software helps manufacturers use the inspection data to reduce manufacturing costs and accelerate time to market.