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Samples in periodicals archive:
The WaferXam tool features a new system design, utilizing enhancements to ADE's patented Angle Resolved Scatter architecture, for highly improved defect detection sensitivity and classification performance.
In addition to incorporating ADE's most advanced optical, Angle Resolved Scatter technology, FIT and AWIS inspection systems are tailored to meet the inline production and factory automation needs of high-volume semiconductor and wafer manufacturing.
The AWIS angle resolved scatter (ARS) architecture is ideal for discriminating between particles and defects.